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Wafer Vision Position System(WVPS)
WVPS-C_User_Manual(2016).pdf
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반도체 웨이퍼 자동 위치 교정용 시스템
- 802.11b/g Wireless LAN Communication.
- 2M Camera, 1600 X 1200 pixel
- 10 um(X,Y), 100um(Y) Resolution.
- Weight 300g
SMART VISION(SV-3830D + GE13M-C)
Flow Sensor(FS-350D)